RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING by Hurwitz, A M, etc. ISBN 0849311780
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[edit] RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING
This text identifies key components of implementing run-to-run (R2R) controls, with a methodology for implementing them for virtually any process. It illustrates the advantages of R2R control with manufacturing case studies.
Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine 'runs,' thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
[edit] Book Details
[edit] Title
RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING
[edit] Author
Hurwitz, A M, etc.
[edit] ISBN
0849311780
[edit] Published
30/11/2000
[edit] Publisher
CRC Press Inc., U.S.
[edit] Binding
hardback
[edit] Retail Price
62.99 (GBP)
[edit] Typical Price Online
59.84 (GBP)
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